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Plasma Treatment system
Plasma Treatment system
Make: HENNIKER PLASMA
Model: HPT - 100
Year of purchase: 2017
Funded by: DST, Govt of India
Location: ICMS
Slot timings:
Contact: jayghatak@jncasr.ac.in
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  • • Chamber Dimension: 100 mm inner Diameter x 280 mm length
  • • Plasma Generator: Minimum 40 KHz with continuously power variable output 0-100W.
  • • Re-entrant style TEM holder adapter
  • • Dual Gas Channels with: Digital Mass Flow Controller.
  • ◦ Resolution: 0.1% of full scale
  • ◦ Repeatability: +/-0.3% of reading Leak rate: <0.1% of full scale
  • • Powered Electrode: Aluminum and Stainless Steel
  • • Microprocessor controlled system
  • • Color touchscreen interface
  • • Gas flow control via mass flow controller
  • • Vacuum pump minimum 5m3/hr pumping speed, two stage rotary type. Base pressure <5E-3mbar. Suitable for use with air, oxygen and non-corrosive gases
  • • Pirani vacuum gauge
  • Plasma surface activation to improve adhesion
  • Functional plasma coatings
  • Plasma etching
  • PDMS & microfluidic devices
  • PEEK & other engineering polymers
  • PTFE
  • Metals, Ceramics, Glass & optical devices
Modes Duration (hrs)
M1 30 mins per slot, Max two loading (per load 5 samples with 1X1 cm2), Oxygen and/or Argon
Sl. No. - Category Fees ( in Rs/- ) + additional 18% GST
02. Industry for M1 Rs 800 per slot
01. Other Academia for M1 Rs 400 per slot